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Archives for Nanofabrication

Flexible Display (AMOLED) Business is growing in China

Display technology has been progressed from heavy and big CRT to thin and potable flat panel display (FPD). FPD consists at least two types: TFT-LCD and AMOLED. Typical flexible display players are SONY, sharp, Samsung, LGD, Plastic Logic, UDC,  AUO and etc. Products such as G Flex by LG, curved OLED TV, Galaxy Edge, Galaxy Gear Fit, Galaxy S6 Edge by Read full article »

Nanoimprint Lithography (NIL) Research Groups and Companies

Nanoimprint Lithography (NIL) is one of the lithography technique where a predefined mould is used to mechanically create nanoscale (including microscale and even bigger) patterns. It is a very promising lithography technique to provide low cost while efficient nanopatterning. NIL has been proposed by Prof. Stephen Chou from Princeton University many years ago, and now it has evolved to many Read full article »

Lithography Recipe for S1805 Positive Resist

  Spin coating 4000 rpm for 30 sec, results in about 0.5 µm film. Prebake 115°C on hotplate for 4 min. Exposure under UV illumination with a dose about 25mJ/cm2. (in our case 7.3mW/cm2 x 3.5 sec also works well). Develop in MF319, about ~40 sec.  Read full article »

Lithography Recipe for AZ5214 Image Reversal

  Spin coating 5000 rpm for 30 sec, results in about 1.25 µm film. Prebake 110°C on hotplate for 60 sec. Exposure under UV illumination with a dose about 19mJ/cm2. (in our case 7.3mW/cm2 x 3sec also works well). Post bake on hotplate 120°C for 2 min. Flood illumination of UV with typical dose more than 200mJ/cm2. (in our case, 7.3mW/cm2 x 3sec also works well ). Develop AZ400K 1:4, about ~20 Read full article »